Metrological scanning probe microscope based on a quartz tuning fork detector

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چکیده

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ژورنال

عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS

سال: 2012

ISSN: 1932-5150

DOI: 10.1117/1.jmm.11.1.011003